Spray Pyrolysis Deposition of SnxSy Thin Films
نویسندگان
چکیده
منابع مشابه
Deposition and characterization of SnO2:Sb thin films fabricated by the spray pyrolysis method
In this study, thin films of transparent semiconductor tin oxide doped with antimony impurities on the glass substrates with different concentrations of antimony that have been prepared using spray pyrolysis method. The effects of different concentration of antimony on the structural, optical, and electrical properties of the thin films were investigated. Prepared layers were characterized by X...
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The deposition of a thin tin oxide film allows for the manufacture of modern gas sensors. Spray pyrolysis deposition is used to grow the required thin films, as it can be seamlessly integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and implemented within the Level Set framework. Two models for the topography modification due to spray pyroly...
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Integration of thin tin oxide film formation into CMOS technology is a fundamental step to realize sensitive smart gas sensor devices. Spray pyrolysis is a deposition technique which has the potential to fulfil this requirement. A model for spray pyrolysis deposition is developed and implemented within a Level Set framework. Two models for the topography modification due to spray pyrolysis depo...
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Thin films of CuS (covellite) were deposited onto TCO (SnO2:F) glass by Spray Pyrolysis (SP) technique. Aqueous and water:alcohol (ethanol, 1-propanol) solutions of copper(II) chloride and thiourea with different Cu/S molar ratio have been used as precursors. The substrate temperature was varied from 185°C to 285°C. The structural and the morphological characterization of the films has been car...
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The In-doped vanadium pentoxide nanostructures with different doping levels including 0, 10, 20 and 30 at.% were prepared by the spray pyrolysis technique. The prepared thin films were characterized by the x-ray diffraction (XRD) and scanning electron microscopy (SEM). The XRD results revealed that the films were crystalline in tetragonal phase. Increasing the In-doping level made the structure...
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ژورنال
عنوان ژورنال: Energy Procedia
سال: 2014
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2014.12.358